Thin Film Technology

The subject of lecture is to understand the importance of thin film technologies in semiconductor industries. Hence, this lecture covers 1) fundamental mechanisms of thin film formation, 2) vacuum technologies for high-quality films, 3) film formation technologies (evaporation, sputtering, epitaxy, etc.), 4) film patterning processes, 5) film characterization methods, and 6) film reliability. More importantly, state-of-the-art thin film technologies and their crucial challenges are discussed.

2022 Spring Semester, ...